Boron Trichloride (BCl 3 )
Boron trichloride (BCl3) is an inorganic compound that is a colorless, toxic, and corrosive gas with a hay-like odor and a pungent smell under standard conditions. It is non-combustible in air and stable in ethyl alcohol. It decomposes in water or alcohol, generating boric acid and hydrochloric acid with the release of significant heat. In moist air, it hydrolyzes to produce fumes. BCl3 is mainly used as a doping source for semiconductor silicon, in the production of various boron compounds, as an organic synthesis catalyst, a fluxing agent in silicate decomposition, and for boriding steel. Additionally, it is used in the manufacture of boron nitride and boranes.
- CAS No.: 10294-34-5
- UN No.: 1741
- EINECS No.: 233-658-4
- Molecular Weight: 117.19 g/mol
- Appearance: Colorless
- Melting Point: -107.3 ℃
- Boiling Point: -12.5℃
- Density: 1.35kg/m³
- Hazard Class (DOT): 2.3 & 8
- Label: Toxic gas, corrosive gas
Chemicals
BCl3 is utilized in the preparation of high-purity boron and as an organic synthesis catalyst. It acts as a fluxing agent in silicate decomposition and is used for boriding iron.
Gaseous Fuel
BCl3 has been used in high-energy fuels and rocket propellants as a boron source to increase BTU value.
Plasma Etching
BCl3 is used in plasma etching in semiconductor manufacturing. This gas etches metal oxides by forming volatile BOClX compounds.
| Gas Cylinder Specifications | Contents | |
| Cylinder Capacity | Cylinder Valve | Weight |
| 47L | CGA660 | 50kg |
| Purity | 99.9% |
| Chlorine (Cl2) | ≤ 10ppm |
| Silicon Tetrafluoride (SiF4) | ≤ 300ppm |
| Oxygen (O2) | ≤ 1ppm |
| Nitrogen (N2) | ≤ 4ppm |
| Carbon Monoxide | ≤ 0.5ppm |
| Carbon Dioxide (CO2) | ≤ 2ppm |
| Methane (CH4) | ≤ 0.5ppm |
| Phosgene (COCl2) | ≤ 1ppm |
