Piezo Translation Stage
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Nanopositioning stage
| Model | 7SPT1-0310 |
| Stroke (mm) | 10 |
| Drive unit | Piezo motor |
| Position transducer | Imported optical grating |
| Max. load (kg) | 0.3 |
| Max. speed (mm/s) | 100 |
| Mini step (nm) | 150 |
| Repeatability (nm) | ±500 |
| Basic materials | Superior aluminum alloy |
| Overall size (mm) | 35×35×15 |
| Model | 7SPT2-0618S |
| Stroke (mm) | 18 |
| Drive unit | Piezo motor |
| Position transducer | Imported optical grating |
| Max. load (kg) | 1 |
| Max. speed (mm/s) | 100 |
| Mini step (nm) | 50 |
| Repeatability (nm) | ±200 |
| Basic materials | Superior aluminum alloy |
| Overall size (mm) | 60×60×23 |
| Model | 7SPT2-0650 |
| Stroke (mm) | 50 |
| Drive unit | Piezo motor |
| Position transducer | Imported optical grating |
| Max. load (kg) | 1 |
| Max. speed (mm/s) | 100 |
| Mini step (nm) | 50 |
| Repeatability (nm) | ±200 |
| Basic materials | Superior aluminum alloy |
| Overall size (mm) | 90×60×23 |
| Model | 7SPT3-1050 |
| Stroke (mm) | 50 |
| Drive unit | Piezo motor |
| Position transducer | Imported optical grating |
| Max. load (kg) | 5 |
| Max. speed (mm/s) | 100 |
| Mini step (nm) | 20 |
| Repeatability (nm) | ±200 |
| Basic materials | Superior aluminum alloy |
| Overall size (mm) | 100×100×26 |
Features
- Driven by a piezoelectric motor.
- Incorporates a brake function to eliminate return clearance.
- Offers nano-level high resolution and accuracy.
- Achieves rapid response times in milliseconds to sub-milliseconds, with speeds reaching up to 300 millimeters per second.
- Boasts long travel distances theoretically without travel restrictions.
- Features an ultra-thin design with a compact structure.
- Free from magnetism, oil, and electromagnetic interference, making it compatible with vacuum environments.
- Widely utilized in semiconductor equipment, micro/nano processing, optoelectronic testing, biomedical, and other fields.
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