Silane (SiH 4 )
Silane is a compound of silicon and hydrogen, typically a colorless gas with a garlic-like odor. It is soluble in water but almost insoluble in ethyl alcohol, ethyl ether, benzene, trichloromethane, trichlorosilane, and tetrachlorosilane. Silane is much more chemically reactive than alkanes and easily oxidizes, often spontaneously igniting upon contact with air. It is a primary specialty gas used in semiconductor microelectronic processes for various thin film preparations, including monocrystalline, microcrystalline, polycrystalline, silicon oxide, silicon nitride, and metal silicides.
- CAS No.: 7803-62-5
- UN No.: 2203
- EINECS No.: 232-263-4
- Molecular Weight: 32.117 g/mol
- Appearance: colorless, garlic-like odor
- Melting Point: -185 ℃
- Boiling Point: -112 ℃
- Density: 1.3kg/m³
- Hazard Class (DOT): 2.1
- Label: Flammable gas
Electronics
Silane is used in the production of semiconductors and sealants, particularly in depositing polycrystalline silicon layers on silicon wafers.
Solar Photovoltaic Module
Silane is utilized in the manufacturing of solar photovoltaic modules.
Industrial Applications
It is employed in the production of energy-efficient green glass and vapor deposition thin film processes.
| Gas Cylinder Specifications | Contents | |
| Cylinder Capacity | Cylinder Valve | Weight |
| 40L | DISS632 | 10kg |
| 440L | DISS632 | 120kg |
| Purity | 99.9999% |
| Oxygen (O2) | ≤ 0.1ppm |
| Nitrogen (N2) | ≤ 0.1ppm |
| Hydrogen (H2) | ≤ 20ppm |
| Helium(He) | ≤10ppm |
| Carbon Monoxide Carbon Dioxide (CO2) | ≤ 0.1ppm |
| Total Hydrocarbons | ≤ 0.1ppm |
| Chlorsilane (SiH3Cl) | ≤ 0.1ppm |
| Disiloxane | ≤ 0.1ppm |
| Disilane (H6Si2) | ≤ 0.1ppm |
| Moisture | ≤ 0.1ppm |
